Semiconductor
Our laboratory conducts research on semiconductors, focusing on the fabrication of Light Emitting Devices (LEDs). We work on creating micro-LED arrays using GaAs (Red) and GaN (Blue) epitaxial wafers. To achieve this, we employ a range of advanced equipment, including ICP-RIE, sputter systems, photolithography tools, and PECVD. The fabricated micro-LEDs are mainly utilized in bio-applications. For instance, Blue micro-LEDs are used in implantable neural probes for optogenetics, while Red micro-LEDs are employed in PPG and SpO2 measurements.